Last edited by Sakazahn
Monday, August 3, 2020 | History

4 edition of Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry found in the catalog.

Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry

Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry

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  • 33 Currently reading

Published by National Aeronautics and Space Administration, National Technical Information Service, distributor in [Washington, D.C, Springfield, Va .
Written in English

    Subjects:
  • Silicon compounds,
  • Superlattices,
  • Germanium compounds,
  • Ellipsometry,
  • Spectroscopic analysis,
  • Strain measurement,
  • Thickness

  • Edition Notes

    StatementA.R. Heyd ... [et al.].
    SeriesNASA-TM -- 111685., NASA technical memorandum -- 111685.
    ContributionsHeyd, A. R., United States. National Aeronautics and Space Administration.
    The Physical Object
    FormatMicroform
    Pagination1 v.
    ID Numbers
    Open LibraryOL17834454M
    OCLC/WorldCa39647979


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Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry Download PDF EPUB FB2